SALES

Manufacturer: AMAT

Model: Centura

Category: RTP-MOD II

Wafer Size: 8

 

Details:

System,8"
Mainframe type:TPCC
Loadlock type:Wide body
Chamber type:Mod II
Chamber A:MOD II ATM RTP
Process:RTP
Chamber B:MOD II ATM RTP
Process:RTP
Chamber C:MOD II ATM RTP
Process:RTP
Line frequency:60 HZ
System power:208 VAC
Mainframe information:ENP Type
Robot type:HP/HP+
Center Finder:OTF
Cooldown Type:Fast Cooldown
Gas Panel:Universal
Gas Line:Multi-Drop